Structural and Mechanical Properties of Zr-Si-N Thin Films...

Materials Research 2015 / 10 Vol. 18; Iss. suppl 2

Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputtering

Freitas, Flávio Gustavo Ribeiro, Hübler, Roberto, Soares, Gabriel, Conceição, Amanda Gardênia Santos, Vitória, Edson Reis, Carvalho, Renata Gomes, Tentardini, Eduardo Kirinus
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Volume:
18
Language:
english
Journal:
Materials Research
DOI:
10.1590/1516-1439.336214
Date:
October, 2015
File:
PDF, 1.13 MB
english, 2015
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