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The Effect of O3 Support for Fabrication of AlOx Thin Film by Mist CVD Technique
UCHIDA, Takayuki, KAWAHARAMURA, Toshiyuki, FRUTA, Mamoru, SANADA, MasaruVolume:
62
Year:
2013
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.62.663
File:
PDF, 2.21 MB
2013