The Effect of O3 Support for Fabrication of AlOx Thin Film...

The Effect of O3 Support for Fabrication of AlOx Thin Film by Mist CVD Technique

UCHIDA, Takayuki, KAWAHARAMURA, Toshiyuki, FRUTA, Mamoru, SANADA, Masaru
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Volume:
62
Year:
2013
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.62.663
File:
PDF, 2.21 MB
2013
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