Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering
Chang, Li-Chun, Zheng, Yu-Zhe, Chen, Yung-IVolume:
8
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings8080263
Date:
July, 2018
File:
PDF, 5.55 MB
english, 2018