The Exploration for an Appropriate Vacuum Level for...

Micromachines 2017 / 04 Vol. 8; Iss. 4

The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner

Zhao, Rong, Qiao, Dayong, Song, Xiumin, You, Qiaoming
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Volume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8040126
Date:
April, 2017
File:
PDF, 10.32 MB
english, 2017
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