High energy pulsed laser deposition of ohmic tungsten...

Thin Solid Films 2018 / 11 Vol. 666

High energy pulsed laser deposition of ohmic tungsten contacts on silicon at room temperature

Dellasega, D., Bollani, M., Anzi, L., Pezzoli, A., Chrastina, D., Gulinatti, A., Irde, G., Sordan, R., Passoni, M., Pietralunga, S.M.
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Volume:
666
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.09.042
Date:
November, 2018
File:
PDF, 6.18 MB
english, 2018
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