High sensitivity and high resolution element 3D analysis by a combined SIMS–SPM instrument
Fleming, Yves, Wirtz, TomVolume:
6
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.6.110
Date:
April, 2015
File:
PDF, 1.16 MB
english, 2015