Continuum models of focused electron beam induced...

Beilstein Journal of Nanotechnology 2015 / 07 Vol. 6

Continuum models of focused electron beam induced processing

Toth, Milos, Lobo, Charlene, Friedli, Vinzenz, Szkudlarek, Aleksandra, Utke, Ivo
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Volume:
6
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.6.157
Date:
July, 2015
File:
PDF, 3.87 MB
english, 2015
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