The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors
Thorman, Rachel M, Kumar T. P., Ragesh, Fairbrother, D Howard, Ingólfsson, OddurVolume:
6
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.6.194
Date:
September, 2015
File:
PDF, 2.49 MB
english, 2015