Evaluation of preparation methods for suspended nano-objects on substrates for dimensional measurements by atomic force microscopy
Fiala, Petra, Göhler, Daniel, Wessely, Benno, Stintz, Michael, Lazzerini, Giovanni Mattia, Yacoot, AndrewVolume:
8
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.8.179
Date:
August, 2017
File:
PDF, 2.31 MB
english, 2017