Angstrom-scale flatness using selective nanoscale etching
Yatsui, Takashi, Saito, Hiroshi, Nobusada, KatsuyukiVolume:
8
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.8.217
Date:
October, 2017
File:
PDF, 1.39 MB
english, 2017