Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing
Rawlings, Colin D, Ryu, Yu Kyoung, Rüegg, Matthieu, Lassaline, Nolan, Schwemmer, Christian, Duerig, Urs, Knoll, Armin, Durrani, Zahid Ali Khan, Wang, Chen, Liu, Dixi, Jones, Mervyn ELanguage:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aae3df
Date:
September, 2018
File:
PDF, 1.49 MB
english, 2018