Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis...

Micromachines 2018 / 08 Vol. 9; Iss. 8

Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification

Han, Ke, Guo, Xubing, Smith, Stewart, Deng, Zhongliang, Li, Wuyu
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9080390
Date:
August, 2018
File:
PDF, 4.78 MB
english, 2018
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