Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
Subramanian, Ashwanth, Tiwale, Nikhil, Nam, Chang-YongLanguage:
english
Journal:
JOM
DOI:
10.1007/s11837-018-3141-4
Date:
September, 2018
File:
PDF, 2.61 MB
english, 2018