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Design and research on large displacement bidirectional MEMS stage with interlock mechanism
Hu, Tengjiang, Fang, Kuang, Zhang, Zhiming, Jiang, Xiaohua, Zhao, YulongVolume:
283
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.09.037
Date:
November, 2018
File:
PDF, 3.69 MB
english, 2018