Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 09 Vol. 36; Iss. 5
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Effects of slow highly charged ion irradiation on metal oxide semiconductor capacitors
Cutshall, Daniel B., Kulkarni, Dhruva D., Harriss, James E., Field, Daniel A., Sosolik, Chad E., Harrell, William R.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5028149
Date:
September, 2018
File:
PDF, 1.79 MB
english, 2018