Design, fabrication and on-the-die characterization of a...

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ISSS Journal of Micro and Smart Systems 2018 / 9

Design, fabrication and on-the-die characterization of a MEMS tuning-fork gyroscope

Reddy, Jayaprakash, Pratap, Rudra
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Language:
english
Journal:
ISSS Journal of Micro and Smart Systems
DOI:
10.1007/s41683-018-0030-6
Date:
September, 2018
File:
PDF, 2.15 MB
english, 2018
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