![](/img/cover-not-exists.png)
Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films
Saghaeian, F., Keckes, J., Schreiber, K.A., Mittereder, T.Volume:
88-90
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2018.07.005
Date:
September, 2018
File:
PDF, 2.83 MB
english, 2018