Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors
Tajalli, A., Canato, E., Nardo, A., Meneghini, M., Stockman, A., Moens, P., Zanoni, E., Meneghesso, G.Volume:
88-90
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2018.06.037
Date:
September, 2018
File:
PDF, 959 KB
english, 2018