Reliability assessment and failure mode analysis of MEMS...

Microelectronics Reliability 2018 / 09 Vol. 88-90

Reliability assessment and failure mode analysis of MEMS accelerometers for space applications

Marozau, I., Auchlin, M., Pejchal, V., Souchon, F., Vogel, D., Lahti, M., Saillen, N., Sereda, O.
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Volume:
88-90
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2018.07.118
Date:
September, 2018
File:
PDF, 1.02 MB
english, 2018
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