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Mixed Stepping / Scanning Mode Control of Stick-Slip SEM-integrated Nano-robotic Systems
Oubellil, R., Voda, A., Boudaoud, M., Régnier, S.Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.08.042
Date:
September, 2018
File:
PDF, 5.77 MB
english, 2018