Structural and morphological properties of TiN deposited by magnetron sputtering
Ghasemi, Saeed, Farhadizadeh, Ali Reza, Amadeh, Ahmad Ali, Ghomi, HamidLanguage:
english
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/aae405
Date:
September, 2018
File:
PDF, 2.17 MB
english, 2018