In situ femtosecond pulse laser ablation for...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 11 Vol. 36; Iss. 6

In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems

Randolph, Steven Jeffrey, Filevich, Jorge, Botman, Aurelien, Gannon, Renae, Rue, Chad, Straw, Marcus
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5047806
Date:
November, 2018
File:
PDF, 4.72 MB
english, 2018
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