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Detection of interstitial oxygen contents in Czochralski grown silicon crystals using internal calibration in laser-induced breakdown spectroscopy (LIBS)
Davari, Seyyed Ali, Taylor, Patrick A., Standley, Robert W., Mukherjee, DibyenduLanguage:
english
Journal:
Talanta
DOI:
10.1016/j.talanta.2018.09.078
Date:
September, 2018
File:
PDF, 2.15 MB
english, 2018