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Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air
KONDO, Yoshimasa, SAITO, Takao, SAITO, Masanori, TERAZAWA, Tatsuya, OHTAKE, NaotoVolume:
72
Year:
2006
Journal:
Journal of the Japan Society for Precision Engineering, Contributed Papers
DOI:
10.2493/jspe.72.1237
File:
PDF, 5.41 MB
2006