Two-step Fabrication of Large Area SiO2/Si Membranes

Materials Science (MEDŽIAGOTYRA) 2012 / 12 Vol. 18; Iss. 4

Two-step Fabrication of Large Area SiO2/Si Membranes

GRIGALIŪNAS, Viktoras, ABAKEVIČIENĖ, Brigita, GRYBAS, Ignas, GUDONYTĖ, Angelė, KOPUSTINSKAS, Vitoldas, VIRŽONIS, Darius, NAUJOKAITIS, Ramūnas, TAMULEVIČIUS, Sigitas
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Volume:
18
Language:
english
Journal:
Materials Science
DOI:
10.5755/j01.ms.18.4.3090
Date:
December, 2012
File:
PDF, 1.74 MB
english, 2012
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