Metallization defect detection in 3D integrated components using scanning acoustic microscopy and acoustic simulations
Kozic, Eva, Hammer, René, Rosc, Jördis, Sartory, Bernhard, Siegert, Joerg, Schrank, Franz, Brunner, RolandVolume:
88-90
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2018.07.075
Date:
September, 2018
File:
PDF, 1.18 MB
english, 2018