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A power supply module for autonomous portable electronics: ultralow-frequency MEMS electrostatic kinetic energy harvester with a comb structure reducing air damping
Lu, Yingxian, Marty, Frédéric, Galayko, Dimitri, Laheurte, Jean-Marc, Basset, PhilippeVolume:
4
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-018-0025-2
Date:
December, 2018
File:
PDF, 4.04 MB
english, 2018