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Deposition Process Optimization of Zinc Oxide Films with Inclined Texture Axis
Luzanov, V. A., Alekseev, S. G., Polzikova, N. I.Volume:
63
Language:
english
Journal:
Journal of Communications Technology and Electronics
DOI:
10.1134/S1064226918090127
Date:
September, 2018
File:
PDF, 672 KB
english, 2018