High-throughput open-air plasma activation of metal-oxide...

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ACS Applied Materials & Interfaces 2018 / 10

High-throughput open-air plasma activation of metal-oxide thin films with low thermal budget

Tak, Young Jun, Hilt, Florian, Keene, Scott Tom, Kim, Won-Gi, Dauskardt, Reinhold H., Salleo, Alberto, Kim, Hyun Jae
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.8b12373
Date:
October, 2018
File:
PDF, 2.48 MB
english, 2018
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