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Coating of a substrate with surface preliminarily treated with intensive flows of high-speed electrons and plasma using a magnetron
Leyvi, A Ya, Yalovets, A PVolume:
830
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/830/1/012111
Date:
May, 2017
File:
PDF, 851 KB
english, 2017