High-Rate Sputtering and Chemical Modification of Silicon...

e-Journal of Surface Science and Nanotechnology 2006 Vol. 4

High-Rate Sputtering and Chemical Modification of Silicon Surfaces Irradiated by Alcohol Cluster Ion Beams

Takaoka, Gikan H., Noguchi, Hidetaka, Nakayama, Kazuya, Kawashita, Masakazu
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Volume:
4
Year:
2006
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2006.473
File:
PDF, 170 KB
english, 2006
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