Microelectromechanical Systems and Devices || Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications
Islam, NazmulVolume:
10.5772/13
Year:
2012
Language:
english
DOI:
10.5772/29671
File:
PDF, 1.65 MB
english, 2012