Fuzzy Adaptive Sliding Mode Control for the Precision Position of Piezo-Actuated Nano Positioning Stage
Fang, Jiwen, Zhang, Lufan, Long, Zhili, Wang, Michael YuVolume:
19
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-018-0171-3
Date:
October, 2018
File:
PDF, 1.92 MB
english, 2018