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Fabrication and characterization of uniaxially strained SOI with wafer level by mechanical bending and annealing
Wu, Shujing, Miao, Dongming, Dai, Xianying, Shao, Chenfeng, Hao, YueVolume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5024444
Date:
April, 2018
File:
PDF, 1.73 MB
english, 2018