SIESTA: A high current ion source for erosion and retention...

Review of Scientific Instruments 2018 / 10 Vol. 89; Iss. 10

SIESTA: A high current ion source for erosion and retention studies

Arredondo, R., Oberkofler, M., Schmid, K., Schwarz-Selinger, T., Jacob, W., Neu, R.
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Volume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5039156
Date:
October, 2018
File:
PDF, 4.03 MB
english, 2018
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