[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Epitaxial encapsulation of fully differential electrodes and large transduction gaps for MEMS resonant structures
Flader, Ian B., Chen, Yunhan, Ahn, Chae Hyuck, Shin, Dongsuk D., Alter, Anne L., Rodriguez, Janna, Kenny, Thomas W.Year:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346594
File:
PDF, 561 KB
english, 2018