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Thermophysics Simulation of Laser Recrystallization of High-Ge-Content SiGe on Si Substrate
Zhang, Chao, Song, Jianjun, Zhang, Jie, Liu, ShulinVolume:
2018
Language:
english
Journal:
Advances in Condensed Matter Physics
DOI:
10.1155/2018/5863632
Date:
August, 2018
File:
PDF, 2.16 MB
english, 2018