Three-dimensional hydrogen silsesquioxane nanostructure fabrication by reversal room-temperature nanoimprint using poly(dimethylsiloxane) mold
Sugano, Norihiro, Okada, Makoto, Haruyama, Yuichi, Matsui, ShinjiVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.06FM05
Date:
June, 2015
File:
PDF, 1.38 MB
english, 2015