Photon emission as a characterization tool for bipolar...

Microelectronics Reliability 2018 / 09 Vol. 88-90

Photon emission as a characterization tool for bipolar parasitics in FinFET technology

Beyreuther, A., Herfurth, N., Amini, E., Nakamura, T., De Wolf, I., Boit, C.
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Volume:
88-90
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2018.07.091
Date:
September, 2018
File:
PDF, 1.33 MB
english, 2018
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