Fabrication of Bevel Structures by Means of the Spatial...

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Advanced Materials Interfaces 2018 / 10

Fabrication of Bevel Structures by Means of the Spatial Gradient of Ion Dose in Ar Gas Cluster Ion Beam and Its Unique Characteristics

Yun, Dong-Jin, Shin, Youngsik, Jung, Chang Hoon, Lee, Jae Cheol, Byun, Sunjung, Chung, JaeGwan, Heo, Sung, Kim, Seong Heon
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Language:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201800825
Date:
October, 2018
File:
PDF, 3.67 MB
english, 2018
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