6H-SiC blistering efficiency as a function of the hydrogen...

Applied Surface Science 2019 / 02 Vol. 466

6H-SiC blistering efficiency as a function of the hydrogen implantation fluence

Daghbouj, N., Li, B.S., Karlik, M., Declemy, A.
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Volume:
466
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.10.005
Date:
February, 2019
File:
PDF, 3.22 MB
english, 2019
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