Sidewall profile reconstruction of microstructures with...

AIP Advances 2018 / 10 Vol. 8; Iss. 10

Sidewall profile reconstruction of microstructures with high aspect ratio based on near-infrared light scanning interferometry

Shi, Jianhua, Han, Bingchen
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5049494
Date:
October, 2018
File:
PDF, 2.46 MB
english, 2018
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