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Influence of Composition of SiCN Film for Surface Activated Bonding
Inoue, Fumihiro, Peng, Lan, Iacovo, Serena, Phommahaxay, Alain, Visker, Jakob, Verdonck, Patrick, Meersschaut, Johan, Dara, Praveen, Sleeckx, Erik, Miller, Andy, Beyne, EricVolume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08605.0159ecst
Date:
July, 2018
File:
PDF, 883 KB
english, 2018