Characterization of Reactive Sputtered Molybdenum Oxide...

e-Journal of Surface Science and Nanotechnology 2009 Vol. 7

Characterization of Reactive Sputtered Molybdenum Oxide Thin Films for Gas Sensors

Boyadzhiev, Stefan, Lazarova, Velichka, Makita, Koji, Kotani, Yuta, Yordanova, Irena, Matsumura, Yoshihito, Rassovska, Milka
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Volume:
7
Year:
2009
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2009.796
File:
PDF, 1.17 MB
english, 2009
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