Crystal defect analysis in AlN layers grown by MOVPE on bulk AlN
Mogilatenko, A., Knauer, A., Zeimer, U., Netzel, C., Jeschke, J., Unger, R.-S., Hartmann, C., Wollweber, J., Dittmar, A., Juda, U., Weyers, M., Bickermann, M.Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2018.10.021
Date:
October, 2018
File:
PDF, 1.45 MB
english, 2018