Observer-based temperature control of an LED heated silicon...

Journal of Process Control 2018 / 10 Vol. 70

Observer-based temperature control of an LED heated silicon wafer

Kleindienst, Martin, Reichhartinger, Markus, Horn, Martin, Staudegger, Felix
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Volume:
70
Language:
english
Journal:
Journal of Process Control
DOI:
10.1016/j.jprocont.2018.07.006
Date:
October, 2018
File:
PDF, 2.91 MB
english, 2018
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