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Plasma-enhanced atomic layer deposition of titanium vanadium nitride
Sowa, Mark J., Ju, Ling, Kozen, Alexander C., Strandwitz, Nicholas C., Zeng, Guosong, Babuska, Tomas F., Hsain, Zakaria, Krick, Brandon A.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5037463
Date:
November, 2018
File:
PDF, 1.27 MB
english, 2018