Low-pressure bonding of monolithic SU-8 microfluidic...

Journal of Micromechanics and Microengineering 2018 / 12 Vol. 28; Iss. 12

Low-pressure bonding of monolithic SU-8 microfluidic devices

Narayan, Suman, Bae, Kraun, Lehn, Robert, Yadav, Sandeep, Ott, Marcus, Meckel, Tobias, Stark, Robert W
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aae322
Date:
December, 2018
File:
PDF, 1.88 MB
english, 2018
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