Deposition of ZrON thin films by reactive magnetron...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 11 Vol. 36; Iss. 6

Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target

Iwata, Hiroshi, Ishii, Hiroki, Kato, Daiki, Kawashima, Shohei, Kodama, Kakeru, Furusawa, Masashi, Tanaka, Masatoshi, Sekiya, Takao
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5042439
Date:
November, 2018
File:
PDF, 1.89 MB
english, 2018
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