Improving the resolution and throughput of achromatic...

Improving the resolution and throughput of achromatic Talbot lithography

Kazazis, Dimitrios, Tseng, Li-Ting, Ekinci, Yasin
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5048506
Date:
November, 2018
File:
PDF, 5.29 MB
english, 2018
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