Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 11 Vol. 36; Iss. 6
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Improving the resolution and throughput of achromatic Talbot lithography
Kazazis, Dimitrios, Tseng, Li-Ting, Ekinci, YasinVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5048506
Date:
November, 2018
File:
PDF, 5.29 MB
english, 2018